Intel Corp. said Monday that it has reached a series of agreements that will eventually see the Santa Clara-based technology giant purchase a 15 percent stake in Dutch semiconductor equipment company ASML Holding.

Intel said in its announcement of the deal — which could ultimately be worth $4.1 billion — that it will initially buy a roughly 10 percent stake in ASML for $2.1 billion. In the transaction’s second phase, which is subject to the approval of ASML shareholders, Intel will purchase an additional 5 percent stake for roughly $1 billion. In addition to those investments, the agreement calls for Intel to commit a total of nearly $1 billion in research and development funding that will be earmarked for the development of ASML chip and semiconductor manufacturing technologies.

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